Conformal Oxide Coating of Carbon Nanotubes

February 8, 2008 2008
Susumu Kawasaki, Gustau Catalan, Hong Jin Fan, Mohamed M. Saad, Marty J. Gregg, Miguel A. Correa-Duarte, Jacob Rybczynski, Finlay D. Morrison, Toshiaki Tatsuta, Osamu Tsuji, and James F. Scott
Appl. Phys. Lett., 2008, 92, 053109

 

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories.